NM_SEMICONJapan2023 Positioning Stage System
We will showcase positioning stage systems for microscopes used in semiconductor manufacturing and inspection.
The ultrasonic motors from Nanomotion, handled by Kōen, can achieve both high-speed movement and precise positioning for positioning stages. Stages utilizing these ultrasonic motors have a proven track record in applications such as electron beam/ion beam stages and light sheet microscopes. These positioning stages are designed based on user specifications by Nanomotion, and we also manufacture and supply them as units. We will be exhibiting a stage system using these ultrasonic motors at "SEMICON Japan 2023," held at Tokyo Big Sight. [Exhibited Products] ■ Ultrasonic Motor (Piezo Motor) "HR Motor" (Demo available) ■ 4-axis stage for the semiconductor industry ■ 5-axis stage for light sheet microscopes We sincerely look forward to your visit.
- Company：工苑
- Price：Other
